VDM300 DI Water Vapor Delivery Module

The Vapor Delivery Module (VDM) from Brooks Instrument is a high-performance, self-contained module for the highly accurate delivery of ultra-high purity deionized (DI) water vapor. It features a power efficient design that enables low temperature, ultra-high purity vapor generation. It utilizes a proven vapor delivery technique and combines it with advanced digital control and integrated diagnostic features in a small, convenient package.