Brooks offers a broad range of thermal mass flow controllers and meters, assuring you that we will have exactly the right device for your application. These thermal mass flow devices provide significant advantages in response time, accuracy, repeatability, turn-down and self-diagnostics.
The SLA5800 Series features the high accuracy, high zero stability and high repeatability you expect from the industry leader in mass flow measurement and control technology. Engineered with advanced, configurable multi-gas/multi-range capabil [...]
SLAMf Series Elastomer Sealed Thermal Mass Flow Controllers & Meters Precision mass flow control. Hardened for the harshest environments. Now available with EtherNet/IP™ Models: SLAMf50 / SLAMf60 / SLAMf51 / SLAMf61 / SLAMf53 / SLAMf63 / S [...]
4800 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters Ultra-fast response for time-critical flow processes. An advanced MEMS-based thermal sensor, combined with a proprietary PID algorithm to optimize control valve response, [...]
5850E & 5850i Series Elastomer Sealed Thermal Mass Flow Controllers (MFC) 5850i & Meters (MFM) 5860i These series utilize a unique, extremely stable flow sensor to provide the reliable, accurate and repeatable measurement and control that toda [...]
GF100 Series Metal Sealed Thermal Mass Flow Controllers & Meters Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers [...]
GF40 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’ [...]